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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
11852968
Issue Dt:
12/26/2023
Application #:
17010929
Filing Dt:
09/03/2020
Publication #:
20200401039
Pub Dt:
12/24/2020
Inventors:
Yosuke ONO, Atsushi OKUBO, Hisako ISHIKAWA, Kazuo KOHMURA, Daiki TANEICHI et al
Title:
PELLICLE, EXPOSURE MASTER, EXPOSURE DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Assignment: 1
Reel/Frame:
053863/0109Recorded: 09/23/2020Pages: 8
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
ONO, YOSUKE
Exec Dt:
08/17/2020
KOHMURA, KAZUO
Exec Dt:
08/17/2020
OKUBO, ATSUSHI
Exec Dt:
08/17/2020
TANEICHI, DAIKI
Exec Dt:
08/15/2020
ISHIKAWA, HISAKO
Exec Dt:
08/17/2020
BIYAJIMA, TSUNEAKI
Exec Dt:
08/31/2020
Assignee:
MITSUI CHEMICALS, INC.
5-2, HIGASHI-SHIMBASHI 1-CHOME
MINATO-KU, TOKYO, JAPAN 105-7122
Correspondent:
BUCHANAN INGERSOLL & ROONEY P.C.
P.O. BOX 1404
ALEXANDRIA, VA 22313-1404

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