Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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16912203
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Filing Dt:
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06/25/2020
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Publication #:
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Pub Dt:
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12/31/2020
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Inventors:
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Taro IKEDA, Naoki WATANABE, Tatsuo HATANO, Nobuhiko YAMAMOTO, Eiki KAMATA
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Title:
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HEATING APPARATUS, HEATING METHOD, AND SUBSTRATE PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME |
| MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| NATH GOLDBERG AND MEYER |
| 112 S WEST STREET |
| ALEXANDRIA, VA 22314 |
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