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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
16915281
Filing Dt:
06/29/2020
Publication #:
20210010130
Pub Dt:
01/14/2021
Inventors:
Kensaku NARUSHIMA, Atsushi MATSUMOTO, Kouichi SEKIDO, Takanobu HOTTA, Takuya KAWAGUCHI
Title:
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Assignment: 1
Reel/Frame:
053089/0709Recorded: 06/30/2020Pages: 7
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
NARUSHIMA, KENSAKU
Exec Dt:
06/10/2020
HOTTA, TAKANOBU
Exec Dt:
06/10/2020
MATSUMOTO, ATSUSHI
Exec Dt:
06/11/2020
KAWAGUCHI, TAKUYA
Exec Dt:
06/10/2020
SEKIDO, KOUICHI
Exec Dt:
06/15/2020
Assignee:
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME MINATO-KU
TOKYO, JAPAN 107-6325
Correspondent:
NATH GOLDBERG & MEYER
112 S. WEST ST.
38161U_JLM/ALS
ALEXANDRIA, VA 22314

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