Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/20/2022
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Application #:
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16515993
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Filing Dt:
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07/18/2019
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Publication #:
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Pub Dt:
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01/21/2021
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Inventors:
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Mauro Cimino, Don Channa Kaluarachchi, Son Phi, Ramyashree Vishnuprasad et al
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Title:
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MULTI-ZONE HEATER MODEL-BASED CONTROL IN SEMICONDUCTOR MANUFACTURING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| LOWENSTEIN SANDLER LLP |
| ONE LOWENSTEIN DRIVE |
| ROSELAND, NJ 07068 |
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