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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
11616194
Issue Dt:
03/28/2023
Application #:
17040483
Filing Dt:
09/22/2020
Publication #:
20210028356
Pub Dt:
01/28/2021
Inventors:
Hiroki MAEHARA, Kiyoshi MAEDA, Ken ANDO, Jun SATO, Shigeru TAHARA
Title:
ETCHING METHOD
Assignment: 1
Reel/Frame:
054226/0245Recorded: 10/30/2020Pages: 13
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
ANDO, KEN
Exec Dt:
09/17/2020
MAEHARA, HIROKI
Exec Dt:
09/17/2020
ATO, JUN
Exec Dt:
09/18/2020
MAEDA, KIYOSHI
Exec Dt:
09/18/2020
TAHARA, SHIGERU
Exec Dt:
09/23/2020
Assignee:
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME MINATO-KU
TOKYO, JAPAN 107-6325
Correspondent:
NATH GOLDBERG & MEYER
112 S. WEST ST.
38306U_JLM/ALS
ALEXANDRIA, VA 22314
Assignment: 2
Reel/Frame:
055708/0357Recorded: 03/23/2021Pages: 14
Conveyance:
CORRECTIVE ASSIGNMENT TO CORRECT THE LAST NAME OF THE THIRD INVENTOR PREVIOUSLY RECORDED ON REEL 054226 FRAME 0245. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT OF ASSIGNORS INTEREST.
Assignors:
ANDO, KEN
Exec Dt:
09/17/2020
MAEHARA, HIROKI
Exec Dt:
09/17/2020
SATO, JUN
Exec Dt:
09/18/2020
MAEDA, KIYOSHI
Exec Dt:
09/18/2020
TAHARA, SHIGERU
Exec Dt:
09/23/2020
Assignee:
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME MINATO-KU
TOKYO, JAPAN 107-6325
Correspondent:
NATH, GOLDBERG & MEYER
112 S. WEST ST.
38306U_JLM/ALS
ALEXANDRIA, VA 22314

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