Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/27/2023
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Application #:
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16807496
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Filing Dt:
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03/03/2020
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Publication #:
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Pub Dt:
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02/25/2021
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Inventors:
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Tsutomu YOSHIMURA, Yasunori YONEKUTA, Naoya HATAKEYAMA, Kohei HIGASHI, Yoichi NISHIDA
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Title:
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ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, RESIST FILM, PATTERN FORMING METHOD, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 26-30, NISHIAZABU 2-CHOME, MINATO-KU |
| TOKYO, JAPAN 1068620 |
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| SUGHRUE MION, PLLC. |
| 2000 PENNSYLVANIA AVE., NW. |
| SUITE 800 |
| WASHINGTON, DC 20006 |
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