Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/04/2022
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Application #:
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16551616
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Filing Dt:
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08/26/2019
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Publication #:
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Pub Dt:
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03/04/2021
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Inventors:
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Alexander Kuznetsov, Chao Chang
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Title:
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Methods And Systems For Semiconductor Metrology Based On Wavelength Resolved Soft X-Ray Reflectometry
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ONE TECHNOLOGY DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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| JOSEPH S SPANO |
| 851 BURLWAY ROAD, SUITE 407 |
| BURLINGAME, CA 94010 |
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