Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17030891
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Filing Dt:
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09/24/2020
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Publication #:
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Pub Dt:
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03/25/2021
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Inventors:
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Koei KURIBAYASHI, Shinya EBATA, Takaaki NODA
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Title:
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APPARATUS AND METHOD FOR CLEANING REACTION VESSEL FOR PROCESSING SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-4, KANDAKAJI-CHO |
| CHIYODA-KU |
| TOKYO, JAPAN 101-0045 |
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| VOLPE KOENIG |
| 30 SOUTH 17TH STREET, 18TH FLOOR |
| PHILADELPHIA, PA 19103 |
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