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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
02/21/2023
Application #:
17022364
Filing Dt:
09/16/2020
Publication #:
Pub Dt:
03/25/2021
Inventors:
Song BAI, Tao SONG, Qi Liang MA, Xuan LI
Title:
Method of Manufacturing a Semiconductor Structure by Forming a Mask Layer using Sidewall Spacers as an Alignment Mark
Assignment: 1
Reel/Frame:
053786/0340Recorded: 09/16/2020Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
09/01/2020
Exec Dt:
09/01/2020
Exec Dt:
09/01/2020
Exec Dt:
09/01/2020
Assignees:
18 ZHANGJIANG ROAD, PUDONG NEW AREA
SHANGHAI, CHINA 201203
NO.18, WEN CHANG RD., ECONOMIC-TECHNOLOGICAL,DEVELOPMENT AREA, DAXING DISTRICT
BEIJING, CHINA 100716
Correspondent:
ANOVA LAW GROUP C/O SMIC
21495 RIDGETOP CIRCLE
SUITE 300
STERLING, VA 20166

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