Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/05/2024
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Application #:
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17036062
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Filing Dt:
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09/29/2020
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Publication #:
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Pub Dt:
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04/22/2021
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Inventors:
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Seung Bae KANG, Sung Hyeon PARK, Jung Gun NAM, Joon-Hwa BAE, Kyung Bo LEE, Keun Woo LEE et al
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Title:
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POLISHING HEAD, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME AND PROCESSING METHOD OF SUBSTRATE USING THE SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1, SAMSUNG-RO, GIHEUNG-GU |
| YONGIN-SI, GYEONGGI-DO, KOREA, REPUBLIC OF 17113 |
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| 30, JE2GONGDAN 3-GIL, MIYANG-MYEON |
| ANSEONG-SI, GYEONGGI-DO, KOREA, REPUBLIC OF 17599 |
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| CANTOR COLBURN LLP |
| 20 CHURCH STREET |
| 22ND FLOOR |
| HARTFORD, CT 06103 |
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05/18/2024 03:49 AM
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