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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
11348760
Issue Dt:
05/31/2022
Application #:
16915437
Filing Dt:
06/29/2020
Publication #:
20210142985
Pub Dt:
05/13/2021
Inventors:
AKIRA KOSHIISHI, YONGWOO LEE, DOWON KIM, YOUNGJIN NOH, TAEIL CHO, MASATO HORIGUCHI et al
Title:
PLASMA PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME
Assignment: 1
Reel/Frame:
053506/0029Recorded: 08/15/2020Pages: 8
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
KOSHIISHI, AKIRA
Exec Dt:
06/04/2020
HORIGUCHI, MASATO
Exec Dt:
06/04/2020
LEE, YONGWOO
Exec Dt:
06/04/2020
KIM, KYOHYEOK
Exec Dt:
06/04/2020
KIM, DOWON
Exec Dt:
06/04/2020
KIM, YUNHWAN
Exec Dt:
06/04/2020
NOH, YOUNGJIN
Exec Dt:
06/04/2020
SUN, JONGWOO
Exec Dt:
06/04/2020
CHO, TAEIL
Exec Dt:
06/04/2020
Assignee:
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU
SUWON-SI, GYEONGGI-DO, KOREA, REPUBLIC OF 16677
Correspondent:
MUIR PATENT LAW, PLLC
P.O. BOX 1213
GREAT FALLS, VA 22066

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