Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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11/29/2022
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Application #:
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16701986
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Filing Dt:
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12/03/2019
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Publication #:
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Pub Dt:
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06/03/2021
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Inventors:
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Elizabeth Neville, Kartik Shah, Satish Radhakrishnan, Vinay Prabhakar, Sungwon Ha et al
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Title:
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RADIATION SHIELD MODIFICATION FOR IMPROVING SUBSTRATE TEMPERATURE UNIFORMITY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| KILPATRICK TOWNSEND & STOCKTON LLP |
| 1100 PEACHTREE STREET |
| SUITE 2800 |
| ATLANTA, GA 30309 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| KILPATRICK TOWNSEND & STOCKTON LLP/AMAT |
| 1100 PEACHTREE STREET |
| SUITE 2800 |
| ATLANTA, GA 30309 |
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