Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/12/2024
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Application #:
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17103938
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Filing Dt:
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11/24/2020
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Publication #:
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Pub Dt:
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06/03/2021
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Inventor:
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Toshihisa Nozawa
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Title:
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SUBSTRATE PROCESSING APPARATUS HAVING ELECTROSTATIC CHUCK AND SUBSTRATE PROCESSING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| VERSTERKERSTRAAT 8 |
| ALMERE, NETHERLANDS 1322 AP |
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| PATRICK LEE |
| 3440 E. UNIVERSITY DRIVE |
| PHOENIX, AZ 85034 |
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