Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17108223
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Filing Dt:
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12/01/2020
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Publication #:
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Pub Dt:
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06/24/2021
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Inventors:
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Takayuki Fujiwara, Kenichi Oikawa, Tomohiro Kobayashi, Masahiro Fukushima
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Title:
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ONIUM SALT COMPOUND, CHEMICALLY AMPLIFIED RESIST COMPOSITION AND PATTERNING PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 6-1, OHTEMACHI 2-CHOME, CHIYODA-KU |
| TOKYO, JAPAN |
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| WESTERMAN HATTORI DANIELS & ADRIAN LLP |
| 8500 LEESBURG PIKE SUITE 7500 |
| TYSONSVA, VA 22182 |
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