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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
09/26/2023
Application #:
17094727
Filing Dt:
11/10/2020
Publication #:
Pub Dt:
07/01/2021
Inventors:
Chih-Cheng CHEN, ShinAn KU, Ting-Hao HSU, Hsin-Chang LEE
Title:
METHOD OF FAST SURFACE PARTICLE AND SCRATCH DETECTION FOR EUV MASK BACKSIDE
Assignment: 1
Reel/Frame:
054328/0980Recorded: 11/10/2020Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
08/05/2020
Exec Dt:
08/05/2020
Exec Dt:
08/05/2020
Exec Dt:
08/05/2020
Assignee:
NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK
HSINCHU, TAIWAN 300
Correspondent:
MCDERMOTT WILL & EMERY LLP
THE MCDERMOTT BUILDING
500 NORTH CAPITOL STREET, N.W.
WASHINGTON, DC 20001

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