Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17149067
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Filing Dt:
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01/14/2021
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Publication #:
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Pub Dt:
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07/29/2021
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Inventors:
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Manabu Iwata, Takahiro Yokoyama, Yoshihide Kihara, Mingmei Wang, Du Zhang, Yu-Hao Tsai et al
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Title:
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HIGH-THROUGHPUT DRY ETCHING OF SILICON OXIDE AND SILICON NITRIDE MATERIALS BY IN-SITU AUTOCATALYST FORMATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| AKASAKA BIZ TOWER |
| 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| TOKYO ELECTRON U.S. HOLDINGS, INC. |
| 2400 GROVE BLVD. |
| AUSTIN, TX 78741 |
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04/29/2024 03:40 AM
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