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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
17156068
Filing Dt:
01/22/2021
Publication #:
Pub Dt:
07/29/2021
Inventors:
Yasutaka HAMA, Nobuaki SHINDO, Shigeru YONEDA
Title:
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
Assignment: 1
Reel/Frame:
055013/0348Recorded: 01/25/2021Pages: 14
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
01/18/2021
Exec Dt:
01/18/2021
Exec Dt:
01/18/2021
Assignee:
3-1 AKASAKA 5-CHOME MINATO-KU
TOKYO, JAPAN 107-6325
Correspondent:
NATH GOLDBERG & MEYER
112 S. WEST ST.
38491U_JLM/ALS
ALEXANDRIA, VA 22314

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