Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/03/2023
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Application #:
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16812081
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Filing Dt:
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03/06/2020
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Publication #:
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Pub Dt:
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09/09/2021
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Inventors:
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Yaoling Pan, Patrick John Tae, Michael D. Willwerth, Leonard Tedeschi et al
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Title:
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CAPACITIVE SENSING DATA INTEGRATION FOR PLASMA CHAMBER CONDITION MONITORING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| JUSTIN K. BRASK |
| 1211 SW FIFTH AVENUE |
| SUITE 1900 |
| PORTLAND, OR 97204 |
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