Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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16323383
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Filing Dt:
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02/05/2019
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Publication #:
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Pub Dt:
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09/16/2021
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Inventors:
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Hitoshi HABUKA, Katsuya FUKAE, Yoshinao TAKAHASHI
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Title:
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METHOD FOR CLEANING SEMICONDUCTOR PRODUCTION CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NATIONAL UNIVERSITY |
| 79-1 TOKIWADAI, HODOGAYA-KU, YOKOHAMA-SHI |
| KANAGAWA, JAPAN 240-8501 |
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| 2-105, KANDA-AWAJICHO |
| CHIYODA-KU |
| TOKYO, JAPAN 101-0063 |
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| YOUNG & THOMPSON |
| 209 MADISON STREET |
| SUITE 500 |
| ALEXANDRIA, VA 22314 |
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