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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
11363705
Issue Dt:
06/14/2022
Application #:
17156186
Filing Dt:
01/22/2021
Publication #:
20210298160
Pub Dt:
09/23/2021
Inventors:
Takayuki OSANAI, Atsushi UEDA, Koichiro KOGE, Akihiro OHSAWA, Toshiya SHINTANI et al
Title:
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS, EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM, AND ELECTRONIC DEVICE MANUFACTURING METHOD
Assignment: 1
Reel/Frame:
055005/0467Recorded: 01/22/2021Pages: 18
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
OSANAI, TAKAYUKI
Exec Dt:
09/07/2020
UEDA, ATSUSHI
Exec Dt:
09/07/2020
KOGE, KOICHIRO
Exec Dt:
09/07/2020
OHSAWA, AKIHIRO
Exec Dt:
09/08/2020
SHINTANI, TOSHIYA
Exec Dt:
09/07/2020
YOSHIDA, YOSHIAKI
Exec Dt:
09/07/2020
ISHIDA, YUKI
Exec Dt:
09/08/2020
TAKADA, YOSUKE
Exec Dt:
09/08/2020
Assignee:
GIGAPHOTON INC.
400, OAZA YOKOKURASHINDEN, OYAMA-SHI
TOCHIGI, JAPAN 3238558
Correspondent:
STUDEBAKER & BRACKETT PC
8255 GREENSBORO DRIVE
SUITE 300
TYSONS, VA 22102

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