Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17349600
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Filing Dt:
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06/16/2021
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Publication #:
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Pub Dt:
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10/07/2021
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Inventors:
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Shinobu SUGIURA, Masaaki UENO, Tetsuya KOSUGI, Hitoshi MURATA, Masashi SUGISHITA et al
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Title:
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Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Heater
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-4, KANDAKAJI-CHO |
| CHIYODA-KU |
| TOKYO, JAPAN 1010045 |
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| EDELL SHAPIRO & FINNAN LLC |
| 9801 WASHINGTONIAN BLVD. |
| SUITE 750 |
| GAITHERSBURG, MD 20878 |
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