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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
08/02/2022
Application #:
16475931
Filing Dt:
07/03/2019
Publication #:
Pub Dt:
10/28/2021
Inventors:
Tatsuhiko Sato, Tsutomu Shinohara, Tomohiro Nakata, Takeru Miura
Title:
VALVE DEVICE, FLUID CONTROL SYSTEM, FLUID CONTROL METHOD, SEMICONDUCTOR MANUFACTURING SYSTEM, AND SEMICONDUCTOR MANUFACTURING METHOD
Assignment: 1
Reel/Frame:
049676/0942Recorded: 07/05/2019Pages: 7
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
06/18/2019
Exec Dt:
06/18/2019
Exec Dt:
06/18/2019
Exec Dt:
06/18/2019
Assignee:
3-2, ITACHIBORI 2-CHOME, NISHI-KU, OSAKA-SHI
OSAKA, JAPAN 550-0012
Correspondent:
YUICHI WATANABE
909 FANNIN, SUITE 3500
HOUSTON, TX 77010

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