Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17329767
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Filing Dt:
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05/25/2021
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Publication #:
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Pub Dt:
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12/23/2021
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Inventors:
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Takayoshi NAKAHARA, Tsutomu OGIHARA, Takeru WATANABE, Daisuke KORI, Yusuke BIYAJIMA
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Title:
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RESIST UNDERLAYER FILM MATERIAL, PATTERNING PROCESS, AND METHOD FOR FORMING RESIST UNDERLAYER FILM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 6-1, OHTEMACHI 2-CHOME |
| CHIYODA-KU |
| TOKYO, JAPAN |
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| AARON L. WEBB |
| OLIFF PLC |
| P.O. BOX 320850 |
| ALEXANDRIA, VA 22320-4850 |
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