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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
11742212
Issue Dt:
08/29/2023
Application #:
17309188
Filing Dt:
05/04/2021
Publication #:
20220028697
Pub Dt:
01/27/2022
Inventors:
Zhongkui Tan, Lisi Xie, Yoko Yamaguchi, Yasushi Ishikawa, Patrick Ponath, Sung Jin Jung et al
Title:
DIRECTIONAL DEPOSITION IN ETCH CHAMBER
Assignment: 1
Reel/Frame:
059711/0264Recorded: 04/29/2022Pages: 7
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
TAN, ZHONGKUI
Exec Dt:
11/06/2019
XIE, LISI
Exec Dt:
10/30/2019
ISHIKAWA, YASUSHI
Exec Dt:
11/01/2019
PONATH, PATRICK
Exec Dt:
10/30/2019
JUNG, SUNG JIN
Exec Dt:
10/30/2019
YAMAGUCHI, YOKO
Exec Dt:
12/20/2019
PARK, SANGJUN
Exec Dt:
11/09/2019
LEE, WONCHUL
Exec Dt:
11/06/2019
CHOI, JAYOUNG
Exec Dt:
10/31/2019
Assignee:
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY
FREMONT, CALIFORNIA 94538
Correspondent:
WEAVER AUSTIN VILLENEUVE & SAMPSON LLP
P.O. BOX 70250
OAKLAND, CA 94612

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