Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17299958
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Filing Dt:
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06/04/2021
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Publication #:
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Pub Dt:
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02/03/2022
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Inventors:
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Taro IKEDA, Satoru KAWAKAMI, Masaki HIRAYAMA
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Title:
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SHOWER PLATE, PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3-1, AKASAKA 5-CHOME, MINATO-KU, |
TOKYO, JAPAN 1076325 |
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2-1-1, KATAHIRA, AOBA-KU, SENDAI-SHI, |
MIYAGI, JAPAN 9808577 |
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NATH, GOLDBERG & MEYER |
112 S WEST STREET |
38639U_JLM_HJ |
ALEXANDRIA, VA 22314 |
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