Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17310574
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Filing Dt:
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08/11/2021
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Publication #:
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Pub Dt:
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02/03/2022
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Inventors:
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Sunil Kapoor, Noah Baker, Yukinori Sakiyama, Karl Frederick Leeser, Liang Meng
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Title:
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ANOMALOUS PLASMA EVENT DETECTION AND MITIGATION IN SEMICONDUCTOR PROCESSING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| WEAVER AUSTIN VILLENEUVE & SAMPSON LLP |
| P.O.BOX 70250 |
| OAKLAND, CA 94612 |
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