Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17415104
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Filing Dt:
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06/17/2021
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Publication #:
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Pub Dt:
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02/10/2022
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Inventors:
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Makoto SEKINE, Tsuyoshi MORIYA, Yoshinori MORISADA, Masaru HORI, Hirotsugu SUGIURA et al
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Title:
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CARBON HARD MASK, FILM FORMING APPARATUS, AND FILM FORMING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1, AKASAKA 5-CHOME, MINATO-KU, |
| TOKYO, JAPAN 1076325 |
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| 1, FURO-CHO, CHIKUSA-KU, NAGOYA-SHI, |
| AICHI, JAPAN 4648601 |
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| NATH, GOLDBERG & MEYER |
| 112 S WEST STREET |
| 38660U_JLM_HJ |
| ALEXANDRIA, VA 22314 |
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