Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/11/2023
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Application #:
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17397561
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Filing Dt:
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08/09/2021
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Publication #:
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Pub Dt:
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02/17/2022
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Inventors:
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Kwangpyo CHOI, Rio SHIMIZU, Takashi SAKUMA, Osamu YOKOYAMA, Kazuki HASHIMOTO et al
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Title:
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METHOD, DEVICE, AND SYSTEM FOR ETCHING SILICON OXIDE FILM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| DOHYUN AHN |
| 801 CALIFORNIA STREET |
| FENWICK & WEST LLP |
| MOUNTAIN VIEW, CA 94041 |
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