Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17501383
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Filing Dt:
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10/14/2021
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Publication #:
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Pub Dt:
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03/03/2022
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Inventors:
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Tongshang SU, Dongfang WANG, Leilei CHENG, Jun LIU, Ning LIU, Qinghe WANG, Liangchen YAN
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Title:
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SPUTTERING SYSTEM AND DEPOSITION METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| XINZHAN INDUSTRIAL PARK |
| HEFEI, ANHUI, CHINA 230012 |
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| NO. 10 JIUXIANQIAO RD., CHAOYANG DISTRICT |
| BEIJING, CHINA 100015 |
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| BROOKS KUSHMAN P.C. |
| 1000 TOWN CENTER, TWENTY-SECOND FLOOR |
| SOUTHFIELD, MI 48075 |
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