Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/08/2023
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Application #:
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17409715
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Filing Dt:
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08/23/2021
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Publication #:
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Pub Dt:
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03/17/2022
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Inventors:
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Injae Lee, Sunghyup Kim, Ouiserg Kim, Junghwan Kim, Daerim Choi, Ohkug Kwon, Yongchan Kim et al
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Title:
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APPARATUS FOR GENERATING EXTREME ULTRAVIOLET LIGHT AND LITHOGRAPHY APPARATUS INCLUDING THE SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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129, SAMSUNG-RO, YEONGTONG-GU |
SUWON-SI, GYEONGGI-DO, KOREA, REPUBLIC OF 16677 |
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MUIR PATENT LAW, PLLC |
P.O. BOX 1213 |
GREAT FALLS, VA 22066 |
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05/14/2024 02:13 PM
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