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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
17421001
Filing Dt:
07/06/2021
Publication #:
Pub Dt:
03/17/2022
Inventors:
Chishio KOSHIMIZU, Shinji KUBOTA
Title:
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Assignment: 1
Reel/Frame:
056767/0448Recorded: 07/06/2021Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
06/28/2021
Exec Dt:
06/30/2021
Assignee:
3-1 AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-6325
Correspondent:
STUDEBAKER & BRACKETT PC
8255 GREENSBORO DRIVE
SUITE 300
TYSONS, VA 22102

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