Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17475720
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Filing Dt:
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09/15/2021
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Publication #:
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Pub Dt:
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03/24/2022
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Inventors:
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Yoshifumi OKADA, Hiroshi KATO, Tomoyuki SHINOHARA, Nobuaki OKITA, Takashi SHINOHARA
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Title:
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SUBSTRATE CLEANING DEVICE, SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE CLEANING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME |
| HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI |
| KYOTO, JAPAN 602-8585 |
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| OSTROLENK FABER LLP |
| 845 THIRD AVENUE |
| NEW YORK, NY 10022 |
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05/08/2024 08:44 PM
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