Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17497559
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Filing Dt:
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10/08/2021
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Publication #:
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Pub Dt:
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04/14/2022
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Inventor:
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Kazushi KANEKO
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Title:
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PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1 AKASAKA 5-CHOME, MINATO-KU, |
| TOKYO, JAPAN 107-6325 |
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| ROTHWELL, FIGG, ERNST & MANBECK, P.C. |
| 607 14TH STREET |
| SUITE 800 |
| WASHINGTON, DC 20005 |
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