Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/15/2023
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Application #:
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17069614
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Filing Dt:
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10/13/2020
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Publication #:
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Pub Dt:
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04/14/2022
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Inventors:
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SETH J. BAMESBERGER, SE-HYUK IM, BYUNG-JIN CHOI
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Title:
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CHUCK ASSEMBLY, PLANARIZATION PROCESS, APPARATUS AND METHOD OF MANUFACTURING AN ARTICLE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 30-2, SHIMOMARUKO 3-CHOME, OHTA-KU |
| TOKYO, JAPAN 146-8501 |
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| CANON USA, INC |
| 15975 ALTON PARKWAY |
| IRVINE, CA 92618-3731 |
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