Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/09/2024
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Application #:
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17532767
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Filing Dt:
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11/22/2021
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Publication #:
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Pub Dt:
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04/21/2022
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Inventors:
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Chun-Ting LIU, Wen-Li WU, Bo-Ching HE, Guo-Dung CHEN, Sheng-Hsun WU, Wei-En FU
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Title:
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X-RAY REFLECTOMETRY APPARATUS AND METHOD THEREOF FOR MEASURING THREE DIMENSIONAL NANOSTRUCTURES ON FLAT SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 195, SEC. 4, CHUNG HSING RD., CHUTUNG |
| HSINCHU, TAIWAN 310401 |
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| BIRCH STEWART KOLASCH & BIRCH LLP |
| 8110 GATEHOUSE RD. |
| SUITE 100E |
| FALLS CHURCH, VA 22042-1248 |
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