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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
05/16/2023
Application #:
17575463
Filing Dt:
01/13/2022
Publication #:
Pub Dt:
05/05/2022
Inventors:
Masanori NAKAGAWA, Hirofumi KOZAKAI
Title:
SUBSTRATE WITH A MULTILAYER REFLECTIVE FILM, REFLECTIVE MASK BLANK, REFLECTIVE MASK, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
Assignment: 1
Reel/Frame:
058652/0145Recorded: 01/13/2022Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
03/19/2020
Exec Dt:
03/19/2020
Assignee:
6-10-1 NISHI-SHINJUKU, SHINJUKU-KU
TOKYO, JAPAN 160-8347
Correspondent:
KILPATRICK TOWNSEND & STOCKTON LLP
1100 PEACHTREE STREET
SUITE 2800
ATLANTA, GA 30309

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