Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17598597
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Filing Dt:
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09/27/2021
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Publication #:
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Pub Dt:
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05/19/2022
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Inventors:
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Masami Akimoto, Satoshi Kaneko, Katsuhiro Morikawa, Mitsuaki Iwashita
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| PEARNE & GORDON LLP |
| 1801 EAST 9TH STREET, SUITE 1200 |
| SUITE 1200 |
| CLEVELAND, OH 44114 |
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05/02/2024 05:29 PM
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