Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17594366
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Filing Dt:
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10/13/2021
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Publication #:
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Pub Dt:
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06/16/2022
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Inventors:
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Pragna Nannapaneni, Novy Tjokro, Sanjay Gopinath, Sema Ermez, Ruopeng Deng, Tianhua Yu et al
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Title:
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RAPID FLUSH PURGING DURING ATOMIC LAYER DEPOSITION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| WEAVER AUSTIN VILLENEUVE & SAMPSON LLP |
| P.O.BOX 70250 |
| OAKLAND, CA 94612-0250 |
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