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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
17595062
Filing Dt:
11/08/2021
Publication #:
20220197147
Pub Dt:
06/23/2022
Inventors:
Andrew LIANG, Nader SHAMMA, Rich WISE, Akhil SINGHAL, Arpan Pravin MAHOROWALA et al
Title:
EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY USING AN INTERVENING LAYER OR A MULTI-LAYER STACK WITH VARYING MEAN FREE PATHS FOR SECONDARY ELECTRON GENERATION
Assignment: 1
Reel/Frame:
058355/0507Recorded: 12/10/2021Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
LIANG, ANDREW
Exec Dt:
06/19/2020
SHAMMA, NADER
Exec Dt:
06/15/2020
WISE, RICH
Exec Dt:
06/15/2020
SINGHAL, AKHIL
Exec Dt:
07/10/2020
MAHOROWALA, ARPAN PRAVIN
Exec Dt:
07/08/2020
BLACHUT, GREGORY
Exec Dt:
06/15/2020
AUSTIN, DUSTIN ZACHARY
Exec Dt:
06/15/2020
Assignee:
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY
FREMONT, CALIFORNIA 94538
Correspondent:
HARNESS, DICKEY & PIERCE, P.L.C.
5445 CORPORATE DRIVE
SUITE 200
TROY, MI 48098

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