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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
17599912
Filing Dt:
09/29/2021
Publication #:
Pub Dt:
06/23/2022
Inventors:
Eiki KAMATA, Mikio SATO, Taro IKEDA, Nobuhiko YAMAMOTO
Title:
PLASMA PROCESSING METHOD AND PLASMA PROCESSING DEVICE
Assignment: 1
Reel/Frame:
057646/0091Recorded: 09/29/2021Pages: 10
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
09/24/2021
Exec Dt:
09/16/2021
Exec Dt:
09/16/2021
Exec Dt:
09/16/2021
Assignee:
3-1 AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-6325
Correspondent:
DOHYUN AHN
FENWICK & WEST LLP
801 CALIFORNIA STREET
MOUNTAIN VIEW, CA 94041

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