Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17126797
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Filing Dt:
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12/18/2020
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Publication #:
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Pub Dt:
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06/23/2022
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Inventors:
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Douglas A. BUCHBERGER JR., Dmitry LUBOMIRSKY, John O. DUKOVIC, Srinivas D. NEMANI
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Title:
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APPARATUS FOR POST EXPOSURE BAKE OF PHOTORESIST
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| PATTERSON + SHERIDAN, LLP |
| 24 GREENWAY PLAZA, SUITE 1600 |
| HOUSTON, TX 77046 |
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