Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17560215
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Filing Dt:
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12/22/2021
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Publication #:
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Pub Dt:
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06/23/2022
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Inventors:
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Genichi NANASAKI, Daisuke HARA, Hideyuki OSADA, Hikaru NIHEI, Tatsuya MORIOKA et al
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Title:
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SUBSTRATE PROCESSING SYSTEM AND PARTICLE REMOVAL METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| WEIHROUCH IP |
| 1737 KING STREET |
| SUITE 200 |
| ALEXANDRIA, VA 22314 |
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