Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17277188
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Filing Dt:
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11/03/2021
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Publication #:
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Pub Dt:
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07/14/2022
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Inventors:
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Hirokazu UEDA, Hiroyuki IKUTA, Yutaka FUJINO
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Title:
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PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| DOHYUN AHN |
| FENWICK & WEST LLP |
| 801 CALIFORNIA STREET |
| MOUNTAIN VIEW, CA 94041 |
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