Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17590857
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Filing Dt:
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02/02/2022
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Publication #:
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Pub Dt:
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08/18/2022
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Inventors:
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Wataru Omuro, Takashi Motoyama, Atsushi Kobayashi, Takenori Takahashi
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Title:
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TEMPERATURE CONTROL DEVICE FOR SEMICONDUCTOR WAFER AND TEMPERATURE CONTROL METHOD FOR SEMICONDUCTOR WAFER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-25-1, SHINOMIYA |
| HIRATSUKA-SHI, KANAGAWA, JAPAN 254-8543 |
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| 2968-2, ISHIKAWA-MACHI |
| HACHIOJI-SHI, TOKYO, JAPAN 192-8515 |
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| LOCKE LORD LLP |
| 701 8TH ST NW, SUITE 500 |
| WASHINGTON, DC 20001 |
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