Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/12/2024
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Application #:
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17572390
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Filing Dt:
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01/10/2022
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Publication #:
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Pub Dt:
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08/25/2022
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Inventors:
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Yong-Dae KIM, Chul-Kyu YANG, Min-Kwang PARK, Mi-Kyung WOO
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Title:
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PHASE SHIFT BLANKMASK AND PHOTOMASK FOR EUV LITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 42 HOSANDONG-RO, DALSEO-GU |
| DAEGU-SI, KOREA, REPUBLIC OF 42714 |
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| WILLIAM PARK & ASSOCIATES LTD. |
| 930 N. YORK ROAD, SUITE 201 |
| HINSDALE, IL 60521 |
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05/31/2024 08:52 AM
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