Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17675228
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Filing Dt:
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02/18/2022
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Publication #:
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Pub Dt:
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08/25/2022
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Inventors:
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Takehisa SAITO, Yohei TAMAZAWA, Toshiki NAKAJIMA, Daisuke KURASHINA, Naoki FUJIWARA
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Title:
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ANTENNA FOR INDUCTIVELY COUPLED PLASMA EXCITATION, ANTENNA UNIT FOR INDUCTIVELY COUPLED PLASMA EXCITATION, AND PLASMA PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| XSENSUS LLP |
| 100 DAINGERFIELD ROAD, SUITE 402 |
| ALEXANDRIA, VA 22314 |
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