Patent Assignment Abstract of Title
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
|
Total Assignments:
1
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
17697628
|
Filing Dt:
|
03/17/2022
|
|
Publication #:
|
|
Pub Dt:
|
09/22/2022
| | | | |
|
Inventors:
|
Kazuhiro HARADA, Takeo HANASHIMA, Takuro USHIDA
|
|
Title:
|
Nozzle Cleaning Method, Substrate Processing Method, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-transitory Computer-readable Recording Medium
|
|
|
Assignment:
1
|
|
|
|
|
|
|
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
|
|
|
|
|
|
|
|
|
| 3-4, KANDAKAJI-CHO |
| CHIYODA-KU |
| TOKYO, JAPAN 1010045 |
|
|
|
|
| EDELL SHAPIRO & FINNAN LLC |
| 9801 WASHINGTONIAN BLVD. |
| SUITE 750 |
| GAITHERSBURG, MD 20878 |
|
|
Search Results as of:
05/09/2024 10:25 PM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|
