Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17755141
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Filing Dt:
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04/21/2022
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Publication #:
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Pub Dt:
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11/24/2022
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Inventors:
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Awnish Gupta, Yaswanth Rangineni, Jeremy David Fields, Chun-Hao Chen et al
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Title:
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RADIO FREQUENCY (RF) POWER IMBALANCING IN A MULTI-STATION INTEGRATED CIRCUIT FABRICATION CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| WEAVER AUSTIN VILLENEUVE & SAMPSON LLP |
| P.O. BOX 70250 |
| OAKLAND, CA 94612 |
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05/21/2024 01:35 PM
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