Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/02/2024
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Application #:
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17838248
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Filing Dt:
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06/12/2022
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Publication #:
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Pub Dt:
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12/22/2022
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Inventors:
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MITSURU MIYAZAKI, HISAJIRO NAKANO, Takuya INOUE
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Title:
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SUBSTRATE SUPPORT MECHANISM, SUBSTRATE CLEANING DEVICE AND SUBSTRATE PROCESSING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 11-1, HANEDA ASAHI-CHO, OTA-KU, |
| TOKYO, JAPAN 1448510 |
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| JCIPRNET |
| 8F-1, NO. 100, ROOSEVELT RD. SEC. 2, |
| TAIPEI, 100404 TAIWAN |
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