Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/14/2023
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Application #:
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17473742
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Filing Dt:
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09/13/2021
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Publication #:
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Pub Dt:
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12/29/2022
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Inventors:
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Min-Yeong Moon, Jonathan Madsen, Stilian Pandev, Andrei V. Shchegrov, Dimitry Sanko et al
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Title:
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SELF-CALIBRATED OVERLAY METROLOGY USING A SKEW TRAINING SAMPLE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ONE TECHNOLOGY DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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| MATTHEW POULSEN, PHD. |
| SUITER SWANTZ INTELLECTUAL PROPERTY |
| 14301 FNB PARKWAY, SUITE 220 |
| OMAHA, NE 68154 |
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